Key Capabilities
The four available imaging modes are suitable for characterizing a wide range of materials.
- Immersion mode with T1, T2, and T3 detectors generally gives the highest resolution images and is suitable for electrically conductive, non-magnetic samples.
- Optiplan mode with T1, T2, and ETD detectors can approach 1nm resolution on conductive materials including magnetic samples.
- Standard mode with T1 & ETD is suited to high-resolution imaging of rough and porous surfaces.
- Low-vacuum mode controls sample charging, enabling SE & BSE imaging of materials with electrical resistance greater than 1010 Ohm without conductive coating.
A hybrid 5th mode, compound lens filtering, is available to enhance compositional contrast on non-magnetic samples,
Additional detectors:
- A retractable cathodoluminescence (CL) detector collects red, green, and blue luminescence from semiconductors and minerals.
- Characteristic x-ray analysis and elemental mapping with EDAX EDS.
- Crystal orientation imaging with EDAX Clarity windowless direct-electron EBSD as low as 3kV
Software:
- Native measurement and annotation tools
- Signal mixing and filtering capabilities
- Thermofisher MAPS with correlative workflow automates large area image acquisition in hi-def and supports import and alignment to images from other sources.
- Autoscript customization toolkit with integrated IDE
Data Produced
- Secondary Electron, Back-scatter Electron, and CL micrographs
- EDS spectra and maps
- EBSD maps, grain statistics, mis-orientation and strain maps
- Hi-Def tile sets of large sample areas
Compatible Samples
Samples must be compatible with a chamber vacuum of 10
-6 mBar. Any residual solvents or residues on the sample that outgas at this pressure will interfere with imaging and can contaminate the instrument. 5-axis motorized eucentric stage, 110 x 110 mm
2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.