Glow Discharge Optical Emission Spectroscopy (GDOES) uses a high-power RF plasma to sputter a crater into nearly any material, and measures the atomic emission of the sputtered material as it is excited within the plasma. This technique therefore gives depth-resolved elemental analysis up to ~1 mm deep with down to 10 nm resolution. Atomic emission lines for 40 elements are collected simultaneously using a high-resolution Nitrogen purged polychromator. These elements are highlighted in the graphic below.