Key Capabilities
The four available imaging modes are suitable for characterizing a wide range of materials.
- Immersion mode with T1, T2, and T3 detectors generally gives the highest resolution images and is suitable for electrically conductive, non-magnetic samples.
- Optiplan mode with T1, T2, and ETD detectors can approach 1nm resolution on conductive materials including magnetic samples.
- Standard mode with T1 & ETD is suited to high-resolution imaging of rough and porous surfaces.
- Low-vacuum mode controls sample charging, enabling SE & BSE imaging of materials with electrical resistance greater than 1010 Ohm without conductive coating.
A hybrid 5th mode, compound lens filtering, is available to enhance compositional contrast on non-magnetic samples.
Additional detectors:
- A retractable sTEM detector with sub-nanometer resolution can quickly screen up to 6 TEM grids in one vacuum cycle.
- The retractable DBS detector with beam deceleration offers another charge control strategy and the ability to selectively mix or isolate topographic and compositional back scatter signals.
- Characteristic x-ray analysis and elemental mapping with Oxford EDS.
- Crystal orientation imaging with Oxford Symmetry EBSD.
Data Produced
- Secondary Electron, Back-scatter Electron, and sTEM micrographs
- EDS spectra and maps
- EBSD maps, grain statistics, mis-orientation and strain maps
- Hi-Def tile sets of large sample areas
Compatible Samples
Samples must be compatible with a chamber vacuum of 10-6 mBar. Any residual solvents or residues on the sample that outgas at this pressure will interfere with imaging and can contaminate the instrument. 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.