Ellipsometry is used for determination of thicknesses and optical parameters of thin films and multilayers.
Spectral Range: 210-1700 nm
Scan Speed: < 10 s for collection of entire spectral range Spot Size: Normal > 1.5 mm, Focused <150 µm
Sample mapping 150X150 mm
Sample Alignment: Automated
Imaging: Integrated CCD camera
Heating Option: Room temp to 300 *C