FEI Sirion Scanning Electron Microscope (SEM)
The Sirion XL30 scanning electron microscope provides high resolution low kV secondary electron imaging from conductive and Au/Pd-coated samples using through-the-lens (TLD) detection technology. For standard gold on carbon substrate the resolution is 3 nm at accelerating voltages up to 30 kV. A solid state back-scatter electron detector is also available for Z-contrast imaging on polished samples.
An integrated Energy Dispersive X-ray Spectrometer (EDS) from Oxford allows elemental analysis and mapping. Standard EDS operating modes include element quantification, line scans, and 2D elemental mapping. Advanced features include element deconvolution, quantitative linescans, and customizable standards.